Ion source having negatively biased extractor
作者： Luke T. Perkins , Benjamin Levitt , Peter Wraight , Arthur D. Liberman
DOI:
关键词:
摘要: An ion source for use in a radiation generator includes sealed envelope containing an ionizable gas therein. The also RF antenna external to the envelope, transmit time-varying electromagnetic fields within producing ions from gas. There is at least one extractor having potential such that are attracted toward extractor.
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