On the double resonance activation of electrostatically actuated microbeam based resonators

摘要: Abstract Electrostatically actuated microelectromechanical system (MEMS) devices have shown prominent potential in various applications. However, despite their low power consumption, they do require high input voltages to be actuated. This is even worse if these are driven around mechanical resonant state. Assuming a double resonance excitation scheme, both electrically and mechanically, activates the system’s electrical resonances simultaneously. activation was recently verified experimentally alleviate problem of actuating voltage/displacement near Therefore, this work, an analytical electro-mechanical coupled model for double-resonance-driven microbeam, assuming classical nonlinear beam combined with RLC electric circuit first proposed then numerically examined. Good match among numerical simulations experimental data when frequency band sufficiently demonstrated. The suggested can used further optimize certain MEMS designs therefore fully benefit from scheme improving sensors actuators.