Time-Resolved Diagnostics of Excimer Laser-Generated Ablation Plasmas used for Pulsed Laser Deposition
DOI: 10.1007/978-94-015-8104-2_12
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摘要: Characteristics of laser plasmas used for pulsed deposition (PLD) thin films are examined with four in situ diagnostic techniques: optical emission spectroscopy, absorption ion probe studies, and gated ICCD (intensified charge-coupled-device array) fast photography. These techniques complementary permit simultaneous views the transport ions, excited states, ground state neutrals hot particulates following KrF ablation YBCO, BN, graphite Si vacuum background gases. The implementation advantages first described order to introduce key features deposition. Aspects interaction plume gases (i.e., thermalization, attenuation, shock formation) collision plasma substrate heater then summarized. photography photon counting applied investigate temperature, velocity, spatial distribution particles generated during graphite. Finally, imaging into high pressure rare presented elucidate internal reflected shocks within plume, redeposition material on a surface, formation nanoparticles plume.
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