Gas sensing characteristics of pure and Fe-doped tungsten oxide thin films

摘要: In this study gas sensing characteristics of pure and 10at% Fe-doped nanostructured tungsten oxide thin films various thicknesses (100–500 nm) prepared by electron beam evaporation are reported. The performances the towards gasses (H 2 , NH 3 NO N O) at different operating temperatures (150–280°C) have been investigated. Very high response both types compared to other target was observed. This indicated that WO based sensors highly selective exhibiting much lower gasses. sensor 300 nm film thickness has shown highest amplitude temperature (150°C). Doping with Fe significantly increases base conductance but also decreases response. amount additives (10 at%) not optimized which can be one factor for decrease A 400 optimum responses among :Fe films. However, change between 200–250°C little variation nm). performance attributed due nanostructural nature obtained through e-beam subsequent annealing 300°C 1 hour in air.