PATTERN INSPECTION DEVICE

摘要: PURPOSE:To make a comparison between the shapes of each pattern on reference substrate and an inspected substrate, coordinate positions pattern, judgement about existence wiring defect, based upon results both measurements. CONSTITUTION:A inspection device has X-Y stage 1, CCD sensor 2, image processing circuit 3, frame memory 4, adder 5, matrix formation 6, shape storage 7, register 8, detecting position 10, defect 11. In this device, is picked up at learning process, data specified stored in 8. Also, 10. At up, 11 makes as well substrate. When measurement agree to other, judged have no defect.