The influence of textured interface on DLC films prepared by vacuum arc

摘要: Abstract Vacuum arc was used to prepare Cr/CrN/DLC films on different textured surfaces fabricated by femto-laser, and the influences of textures with patterns, sizes, orientations structures, adhesion mechanical properties were investigated. The physical chemical characteristics DLC studied scanning electron microscopy (SEM), Raman. Morphology instrument test structure surface topography. Adhesive strength anti-wear measured scratch tester SRV micro-tester. results showed that micro-structures improve contents sp3 in film, also affect adhesive increasing interval from 150 350 μm, which processed femto-laser under 0.96 power density, 400 mm/min processing speed. experiment certificated film stripe 250–350 μm best properties, wear rate 250 μm lower than 1.35 × 10−6 mm3/Nm, up 52 N micro-structure separated around 350 μm. femto-second ultrafast laser has little influence substrate, improved suitable size. Compared without micro-structure, interface enhanced 50 times.