作者: Michael James Myers
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摘要: We describe the development of a novel millimeter-wave cryogenic detector. The device integrates planar antenna, superconducting transmission line, bandpass filter, and bolometer onto single silicon wafer. uses Transition-Edge Sensor (TES) thermistor, which provides substantial advantages over conventional semiconductor bolometers. detector chip is fabricated using standard micro-fabrication techniques.This highly-integrated architecture particularly well-suited for use in polarization-sensitive receivers with thousands pixels. Such are needed to meet sensitivity requirements next-generation cosmic microwave background polarization experiments.The design, fabrication, testing prototype array pixels described. Preliminary considerations full design also discussed. A set on-chip test structures were developed help understand performance our microstrip circuits. These produce calibrated measurement an arbitrary two-port circuit optical techniques, rather than network analyzer. Some results presented.