Surface acoustic wave based ozone sensor with a InOx / Si3N4 / 36° YX LiTaO3 structure
作者： Alexandru C. Fechete , Samuel J. Ippolito , Kourosh Kalantar-Zadeh , Wojtek Wlodarski , Anthony S. Holland
DOI: 10.1117/12.582076
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摘要: ABSTRACT A layered Surface Acoustic Wave (SAW) device based on an InO x / Si 3 N 4 36 o YX LiTaO structure is investigated for sensing ozone in air at different operating temperatures and concentrations. These concentrations are between 25 ppb 150 ppb. Layered SAW devices of a great interest as they show remarkable performance liquid gas applications. This single delay line with 64 input output finger pairs, having periodicity 24 Y-cut X-propagating lithium tantalate (LiTaO ) piezoelectric substrate. 1 µm thick silicon nitride (Si layer was deposited over the pairs 100 nm indium oxide (InO layer. Both layers were by RF magnetron sputtering. chosen it has sensitivity towards ozone. inert stable characteristics high temperature. The sensor analysed terms response time, recovery time magnitude function operational temperature ranges 185°C 205° C. shows repeatability, reversibility, fast time. At approximately 190° C highest observed. frequency shift 5.0 kHz ppb, 6.5 50 recorded. presented results this promising Keywords : sensor, oxide, nitride,
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