Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems
作者： S P Beeby , A Blackburn , N M White
DOI: 10.1088/0960-1317/9/3/302
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摘要: … reaction can be seen to spread progressively further away from its edge as the firing temperature increases. There is very little surface reaction … The reaction is clearly visible at 950 ◦ C …
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