The surface acoustic wave velocities and electro-mechanical coupling coefficients of AlN thin films
作者： Ouyang Xu , Xixin Qu , Weixiao Zhang
DOI: 10.1109/ICPADM.1988.38351
关键词:
摘要: Problems encountered in measuring the surface-acoustic wave (SAW) properties of layered structures are discussed. The phase-coherent method and admittance used dispersion relationship between SAW phase velocity, electromechanical coupling coefficient, h*k (h is thickness AlN thin films on silicon or glass k wavenumber). Measurements show that only valid coefficients with any kind interdigital transducers (IDTs). can work for thin-film IDTs without counterelectrodes. >
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