X-RAY EXPOSURE APPARATUS

摘要: PURPOSE:To enable protection of a synchrotron radiation apparatus when leak occurs, without causing damage in window material, by controlling operations opening and closing shut-off valve, communication valve pump accordance with pressures detected first to third pressure detecting means. CONSTITUTION:When sensor 115A provided an exposure chamber 119A exceeds prescribed PO due failure load lock wafer preliminary 117A or mask 123A adjustment the like, emergency 103A, valves 108A 126A 109A are put closed states together and, succession, 111A is opened state. When any one P1 P4 sensors 102A, 106A, 107A 13A between material 114A set beforehand, 103A then it checked up which shows rising pressure.