A two-axis electrothermal SCS micromirror for biomedical imaging
作者： A. Jain , Tuqiang Xie , Yingtian Pan , G.K. Fedder , Huikai Xie
DOI: 10.1109/OMEMS.2003.1233444
关键词:
摘要: This paper reports a 1 mm/sup 2/, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40/spl deg/), which can be used for biomedical imaging. The is fabricated by deep-reactive-ion-etch post-CMOS micromachining process.
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