THREE-DIMENSIONAL MEMORY DEVICE WITH MOBILITY-ENHANCED VERTICAL CHANNELS AND METHODS OF FORMING THE SAME

作者: Chun Ge , Yanli Zhang , Fei Zhou , Raghuveer S Makala

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摘要: (57) ABSTRACT A combination of an alternating stack and a memory open ing fill structure is provided over a substrate. The alternating stack includes insulating layers and electrically …

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