Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement
作者： Li-Sheng Hsu , Shu-Wei Tung , Che-Hsi Kuo , Yao-Joe Yang
DOI: 10.3390/S140712370
关键词:
摘要: This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic etching was employed to form a standard pyramidal microtip array and HF/HNO3 isotropic used fabricate barbs on these microtips. To improve the electrical conductance between tip front side of wafer contact back side, through-silicon via created during process. The experimental results show that forces required detach from human skin, polydimethylsiloxane (PDMS) polymer, polyvinylchloride (PVC) film were larger compared with those lacked barbs. impedances skin-electrode interface measured performance levels proposed dry characterized. Electrode prototypes implemented. Electroencephalogram (EEG) electrocardiography (ECG) recordings also demonstrated.
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