Radio Frequency Microelectromechanical Systems (RF MEMS)
作者： Christopher D. Nordquist , Roy H. Olsson
关键词:
摘要: Radio frequency microelectromechanical system (RF MEMS) devices are microscale that achieve superior performance relative to other technologies by taking advantage of the accuracy, precision, materials, and miniaturization available through microfabrication. These use their mechanical electrical properties perform a specific RF function such as switching, transmission, or filtering. MEMS has been popular area research since early 1990s, within last several years, technology matured sufficiently for commercialization in commercial market systems. Keywords: radio systems; micromachining; acoustic filters; microwave switches
sci-hub.se 参考文章(116)
H. Cheng, J.F. Whitaker, T.M. Weller, L.P.B. Katehi, Terahertz-bandwidth characterization of coplanar waveguide via time-domain electro-optic sampling international microwave symposium. pp. 477- 480 ,(1994) , 10.1109/MWSYM.1994.335437
K. M. Lakin, J. S. Wang, Acoustic bulk wave composite resonators Applied Physics Letters. ,vol. 38, pp. 125- 127 ,(1981) , 10.1063/1.92298
G.M. Rebeiz, Guan-Leng Tan, J.S. Hayden, RF MEMS phase shifters: design and applications IEEE Microwave Magazine. ,vol. 3, pp. 72- 81 ,(2002) , 10.1109/MMW.2002.1004054
H. Eid, N. Joshi, N. E. McGruer, G. G. Adams, A Model of Contact With Adhesion of a Layered Elastic-Plastic Microsphere With a Rigid Flat Surface Journal of Tribology-transactions of The Asme. ,vol. 133, pp. 031406- ,(2011) , 10.1115/1.4004343
L Khine, M Palaniapan, High-Q bulk-mode SOI square resonators with straight-beam anchors Journal of Micromechanics and Microengineering. ,vol. 19, pp. 015017- ,(2009) , 10.1088/0960-1317/19/1/015017
Guanghai Ding, David Molinero, Weike Wang, Cristiano Palego, Subrata Halder, James C. M. Hwang, Charles L. Goldsmith, Intelligent Bipolar Control of MEMS Capacitive Switches IEEE Transactions on Microwave Theory and Techniques. ,vol. 61, pp. 464- 471 ,(2013) , 10.1109/TMTT.2012.2227782
Imed Zine-El-Abidine, Michal Okoniewski, A tunable radio frequency MEMS inductor using MetalMUMPs Journal of Micromechanics and Microengineering. ,vol. 17, pp. 2280- 2287 ,(2007) , 10.1088/0960-1317/17/11/015
Shifang Zhou, Xi-Qing Sun, William N Carr, A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation Journal of Micromechanics and Microengineering. ,vol. 9, pp. 45- 50 ,(1999) , 10.1088/0960-1317/9/1/305
G.K. Fedder, R.T. Howe, Tsu-Jae King Liu, E.P. Quevy, Technologies for Cofabricating MEMS and Electronics Proceedings of the IEEE. ,vol. 96, pp. 306- 322 ,(2008) , 10.1109/JPROC.2007.911064
N. Yamauchi, T. Shirai, T. Yoshihara, Y. Hayasaki, T. Ueda, T. Matsushima, K. Wasa, I. Kanno, H. Kotera, High coupling piezoelectric thin films of Pb"Zr,Ti…O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators Applied Physics Letters. ,vol. 94, pp. 172903- ,(2009) , 10.1063/1.3126060