Sensor element and particle sensor
作者： Joseph S. Eckerle , Eric J. Shrader , Yukihisa Takeuchi , Ronald E. Pelrine , Kazuyoshi Shibata
DOI:
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摘要: A sensor element for detecting solid particles in a fluid includes: unit including piezoelectric film consisting essentially of ceramic material, first electrode coated onto at least portion the outer surface film, and second inner film; vibrating being placed on so that is portion; fixing may vibrate. At one contacts with particle converts vibration into an electric signal. includes element. The are excellent detection precision durability low cost.
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