Method for treatment of moving substrate by electric discharge plasma and device therefor

摘要: According to the proposed method a moving substrate is transported through plurality of zones treatment by plasma flows, arranged parallel substrate. Plasma flows are produced in each zone individual regions, plasma-forming gas being supplied into gaps between adjacent regions and directed surface These electric potentials, equal magnitude similar polarity, electrodes used generate regions. In device realizing method, pairs form so that any two have their like facing other, feed nozzles fit said electrodes.