作者: Didier Cruz
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摘要: An apparatus which makes it possible to store or place flat articles (20) in a storage cassette (18) with the aid of an intermediate (60), so that is temporarily latter certain (20). The includes gripping device (50) having number tracks (2) corresponding racks (18). It also whereof each rack placed as correspond device. In order insert remove article respect cassete (18), (21) from might cause hindrance during penetration into A pneumatic raising responsible for handling on (2). Specific application silicon wafers used manufacture integrated circuits.