作者: Gabriela Voskerician , Matthew S. Shive , Rebecca S. Shawgo , Horst von Recum , James M. Anderson
DOI: 10.1016/S0142-9612(02)00565-3
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摘要: … a targeted electrochemical reaction (anode/cathode). The goal of … dioxide and silicon nitride were used for their dielectric and … : (A) A silicon substrate is (B) coated with silicon nitride and …