Soft-x-ray-induced secondary-electron emission from semiconductors and insulators: Models and measurements

作者: Burton L. Henke , John Liesegang , Steven D. Smith

DOI: 10.1103/PHYSREVB.19.3004

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摘要: Secondary-electron energy distribution curves (EDC's) and the total secondary-electron yields relative to such for gold have been measured seven semiconductors which electron-electron scattering losses within emitter were considered dominant nine insulators (alkali halides) electron-phonon expected be in transport process. The spectra excited by Al-$K\ensuremath{\alpha}$ (1487 eV) photons from evaporated dielectric films (of about 0.3 \ensuremath{\mu} thickness) on conducting substrates with an electrostatic hemispherical analyzer of 0.03-eV resolution. Some photoemitters appreciably narrower distributions higher than has gold; CuI CsI EDC widths at half-maximum one-third that gold, yield values 11 30 times greater. FWHM 4 eV 0.50 electrons per normally incident photon, respectively. shapes EDC's found essentially unchanged photon excitation 0.1-10-keV region. Strong structural features appear only alkali halide EDC's, it is proposed these are mainly result single-electron promotion secondaries valence band plasmon deexcitation. A relatively simple model x-ray photoemission developed assumes direct photoelectron Auger-electron "primaries" mechanism, accounts both Free-electron conduction-band descriptions assumed. theoretical experimental satisfactory agreement.

参考文章(42)
Burton L. Henke, Jerel A. Smith, David T. Attwood, 0.1–10‐keV x‐ray‐induced electron emissions from solids—Models and secondary electron measurements Journal of Applied Physics. ,vol. 48, pp. 1852- 1866 ,(1977) , 10.1063/1.323938
Evan O. Kane, Simple Model for Collision Effects in Photoemission Physical Review. ,vol. 147, pp. 335- 339 ,(1966) , 10.1103/PHYSREV.147.335
Steven W. Duckett, Random-Walk Models of Photoemission Physical Review. ,vol. 166, pp. 302- 306 ,(1968) , 10.1103/PHYSREV.166.302
David C. Langreth, Scattering Effects in Photoelectric Emission from Solids. I Physical Review B. ,vol. 3, pp. 3120- 3126 ,(1971) , 10.1103/PHYSREVB.3.3120
R. Stuart, F. Wooten, W. E. Spicer, Monte Carlo Calculations Pertaining to the Transport of Hot Electrons in Metals Physical Review. ,vol. 135, pp. 495- 505 ,(1964) , 10.1103/PHYSREV.135.A495
J. M. Ballantyne, Effect of Phonon Energy Loss on Photoemissive Yield near Threshold Physical Review B. ,vol. 6, pp. 1436- 1455 ,(1972) , 10.1103/PHYSREVB.6.1436
D. J. Bartelink, J. L. Moll, N. I. Meyer, Hot-Electron Emission From Shallowp−nJunctions is Silicon Physical Review. ,vol. 130, pp. 972- 985 ,(1963) , 10.1103/PHYSREV.130.972
H. W. Streitwolf, Zur Theorie der Sekundärelektronenemission von Metallen Der Anregungsprozeß Annalen der Physik. ,vol. 458, pp. 183- 196 ,(1959) , 10.1002/ANDP.19594580308