Method for fabricating MEMS device with protection rings
作者： Meng-Jia Lin , Tzung-Han Tan , Ming-I Wang , Bang-Chiang Lan , Chien-Hsin Huang
DOI:
关键词:
摘要: A method for fabricating a microelectromechanical system (MEMS) device of the present invention includes following steps: providing substrate, comprising circuit region and MEMS separated from each other; forming an interconnection structure on substrate in region, simultaneously plurality dielectric layers first electrode wherein comprises at least two metal formed protection ring connecting adjacent layers, so as to define enclosed space between layers; second electrode; removing outside form cavity electrodes.
lens.org 参考文章(14)
Emmanuel P. Quevy, Roger T. Howe, Mems coupler and method to form the same ,(2010)
Takeshi Mori, Toru Watanabe, Shogo Inaba, Akira Sato, Electronic Device and Method for Manufacturing Thereof ,(2010)
J.L. Julian Tham, Kenneth D. Pedrotti, James L. Bartlett, O. Marcy th Henry, Deepak Mehrotra, Jun J. Yao, Charles W. Seabury, David R. Pehlke, Mau Chung F. Chang, Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology ,(1997)
Tsukasa Fujimori, Yuko Hanaoka, Natsuki Yokoyama, Takafumi Matsumura, Hiroshi Fukuda, Integrated micro electro-mechanical system and manufacturing method thereof ,(2005)
Michael Bennett Cohn, Ji-Hai Xu, MEMS device with integral packaging ,(2001)
Samuel Lee Miller, Murray Steven Rodgers, Self-shadowing MEM structures ,(2004)
John N. Harb, Rodney M. Lafollette, Linton G. Salmon, Microscopic batteries for MEMS systems ,(2004)
Y.B Ning, A.W Mitchell, R.N Tait, Fabrication of a silicon micromachined capacitive microphone using a dry-etch process Sensors and Actuators A-physical. ,vol. 53, pp. 237- 242 ,(1996) , 10.1016/0924-4247(96)01130-2
Martinus Jacobus Coenen, Electronic device and carrier substrate ,(2004)
Zhe Wang, Yubo Miao, A silicon microphone with softly constrained diaphragm ,(2004)