Performance of an AuPd micromechanical resonator as a temperature sensor
作者： Ashok Kumar Pandey , Oded Gottlieb , Oleg Shtempluck , Eyal Buks
DOI: 10.1063/1.3431614
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摘要: In this work we study the sensitivity of primary resonance an electrically excited microresonator for possible usage a temperature sensor. We find relatively high normalized responsivity factor Rf=|TfdfdT|=0.37 with quality ∼105. To understand outcome perform theoretical analysis based on experimental observation. that dominant contribution to comes from dependence tension in beam. Subsequently, Rf is found be inversely proportional initial tension. Corresponding particular temperature, can increased by applying bias voltage.
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