Electronic device covered by multiple layers and method for manufacturing electronic device
作者： Yoko Kanemoto , Shogo Inaba , Akira Sato
DOI:
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摘要: An electronic device according to the invention includes: a substrate; an MEMS structure formed above and covering defining cavity in which is arranged, wherein has first layer from having through-hole communication with second closing through-hole, region located at least around region, thinner than distance between substrate longer region.
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