Counterflow microchannel cooler for integrated circuits
作者： II Richard C. Blish
DOI:
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摘要: A plurality of channels are formed in a base, e.g., substrate an integrated circuit, each channel extending between edges the base. Two pairs manifolds provided, first pair communicating with group and second channels, plena isolated from plena. Each includes multiple branches coupled to common plenum. Cooling fluid is injected into different sides causing flow directions two groups thermal contact circuit.
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