Microscopic structure and generation mechanism of E/sub /spl gamma//' centers in buried oxide
作者： SP Kama , RD Pugh , CP Brothers , W Shedd , BBK Singaraju
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摘要: It is shown on the basis of first-principles quantum mechanical calculations that observed 420G hyperfine signal attributed to E/sub /spl gamma//' center in amorphous SiO/sub 2/ could result either from a negatively charged symmetric or positively asymmetric oxygen-deficient (ODC). Energetic considerations slightly favor ODC at preexisting equiv/Si-Si/spl equiv/ sites as local microscopic structure center.
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