摘要: Abstract Computational techniques to improve resolution, remove interferences and identify chemical components in recorded spectra are becoming commonplace surface analysis. One technique, known as factor analysis, is particularly useful for extracting information removing peak overlap from data sets. Its power lies its ability quantify the constituting a or physical system. For example, if depth profile set reflects changing chemistry, analysis can be used (1) within profiled layer (2) reconstruct show distribution of components. The use spectroscopies reviewed this paper. Factor has been enhance bonding thin films interfaces studied with such Auger electron spectroscopy, secondary ion mass spectrometry X-ray photoelectron spectroscopy. In addition, elemental profiles scattering when peaks interest each other during course
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sci-hub.se 参考文章(14)
T.W. Rusch, R.L. Erickson, oscillatory scattered ion yields in low energy ion-surface scattering Inelastic Ion–Surface Collisions. pp. 73- 104 ,(1977) , 10.1016/B978-0-12-703550-5.50009-1
Edmund R. Malinowski, Factor Analysis in Chemistry ,(1980)
Edmund R. Malinowski, Determination of the number of factors and the experimental error in a data matrix Analytical Chemistry. ,vol. 49, pp. 612- 617 ,(1977) , 10.1021/AC50012A027
Stephen W. Gaarenstroom, Principal component analysis of Auger line shapes at solid—solid interfaces Applications of Surface Science. ,vol. 7, pp. 7- 18 ,(1981) , 10.1016/0378-5963(81)90056-8
V. Atzrodt, H. Laxge, Principal Component Analysis as a Method for Silicide Investigation with Auger Electron Spectroscopy Physica Status Solidi (a). ,vol. 79, pp. 489- 496 ,(1983) , 10.1002/PSSA.2210790220
Stephen W. Gaarenstroom, Application of factor analysis to elemental detection limits in sputter depth profiling Applied Surface Science. ,vol. 26, pp. 561- 574 ,(1986) , 10.1016/0169-4332(86)90127-3
J. S. Solomon, Applications of factor analysis to electron and ion beam surface techniques Surface and Interface Analysis. ,vol. 10, pp. 75- 86 ,(1987) , 10.1002/SIA.740100204
N.H. Turner, W.W. Lee, Quantitative analysis of mixtures by Auger electron spectroscopy Applied Surface Science. ,vol. 25, pp. 345- 354 ,(1986) , 10.1016/0169-4332(86)90079-6
R. A. Gilbert, J. A. Llewellyn, W. E. Swartz, J. W. Palmer, Application of Factor Analysis to the Resolution of Overlapping XPS Spectra Applied Spectroscopy. ,vol. 36, pp. 428- 430 ,(1982) , 10.1366/0003702824639565
S. W. Gaarenstroom, Application of Auger line shapes and factor analysis to characterize a metal‐ceramic interfacial reaction Journal of Vacuum Science and Technology. ,vol. 20, pp. 458- 461 ,(1982) , 10.1116/1.571333