PROCEDE DE REALISATION DE REVETEMENTS PROTECTEURS EMPECHANT LE DEPOT DE COKE
作者： Mccarroll John James , Brown David Emmerson , Sims Malcolm Leslie , Clark John Trevor Kent
DOI:
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摘要:
lens.org 参考文章(2)
Takashi Tokuyama, Keijiro Uehara, Method for treating the surface of semiconductor devices ,(1968)
Kenneth E Statham, Semiconductor devices and methods of making same ,(1965)