Mechanical properties of Mo(C)N coatings deposited using cathodic arc evaporation

摘要: Abstract The mechanical and tribological properties of Mo(C)N coatings with different carbon concentration have been investigated. set chemical composition were grown using cathodic arc evaporation in various atmosphere (nitrogen acetylene mixture) the vacuum chamber. tested macro- micro-scale. tests macro-scale included: surface morphology (SEM, contact profilometry), hardness (nanoindentation), adhesion (scratch test), friction wear (pin-on-disc). AFM method has applied to measure properties: coefficient force, highest about 19 at.%. shown very good steel substrates, 60 N. reached 44 GPa for free Mo N evident minimum, 34 GPa coating 14 at.% carbon. rate ball-on-disc system (macro-scale) low, even (4.7 ± 1.6) × 10 − 17  m 3 /Nm 0.64 C 0.07 0.29 two orders magnitude lower than test (micro-scale) - 9.6 × 10 − 14 /Nm. Coefficient one level higher micro-scale, it 0.42 0.041 respectively.