摘要: With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as IC-compatible tanks for use low phase noise oscillators and highly selective filters communications subsystems. To date, LF have been fully integrated using merged CMOS+microstructure technologies, bandpass consisting spring-coupled micromechanical demonstrated HF range. In particular, two-resonator with frequencies up 14.5 MHz, percent bandwidths on order 0.2%, insertion losses less than 1 dB. Higher-order three-resonator near 455 kHz also achieved, equally impressive 0.09% bandwidths, more 64 dB passband rejection. Evidence suggests that ultimate frequency range this high-Q tank technology depends upon material limitations, well design constraints-in degree electromechanical coupling achievable micro-scale resonators.
berkeley.edu参考文章(27)
Theresa A. Core, Steven J. Sherman, W.K. Tsang, Fabrication technology for an integrated surface-micromachined sensor Solid State Technology. ,vol. 36, pp. 39- 45 ,(1993)
R.D. Nasby, J.J. Sniegowski, J.H. Smith, S. Montague, C.C. Barron, W.P. Eaton, D.L. Hetherington, C.A. Apblett, J.G. Fleming, P.J. McWhorter, Application of chemical-mechanical polishing to planarization of surface-micromachined devises Solid-state sensor and actuator workshop, Hilton Head, SC (United States), 2-6 Jun 1996. ,(1996) , 10.31438/TRF.HH1996.11
Robert A. Johnson, Mechanical filters in electronics ,(1983)
F.D. Bannon, J.R. Clark, C.T.-C. Nguyen, High frequency microelectromechanical IF filters international electron devices meeting. pp. 773- 776 ,(1996) , 10.1109/IEDM.1996.554094
Anatol I. Zverev, Handbook of Filter Synthesis ,(1967)
R. Ruby, P. Merchant, Micromachined thin film bulk acoustic resonators Proceedings of IEEE 48th Annual Symposium on Frequency Control. pp. 135- 138 ,(1994) , 10.1109/FREQ.1994.398344
R.T. Howe, R.S. Muller, Resonant-microbridge vapor sensor IEEE Transactions on Electron Devices. ,vol. 33, pp. 499- 506 ,(1986) , 10.1109/T-ED.1986.22519
James M. Bustillo, Gary K. Fedder, Clark T. -C. Nguyen, Roger T. Howe, Process technology for the modular integration of CMOS and polysilicon microstructures Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 1, pp. 30- 41 ,(1994) , 10.1007/BF01367758
C.T.-C. Nguyen, R.T. Howe, Design and performance of CMOS micromechanical resonator oscillators Proceedings of IEEE 48th Annual Symposium on Frequency Control. pp. 127- 134 ,(1994) , 10.1109/FREQ.1994.398345
A.A. Abidi, Direct-conversion radio transceivers for digital communications international solid-state circuits conference. ,vol. 30, pp. 1399- 1410 ,(1995) , 10.1109/4.482187