Morphological stability of Pt coatings deposited on Cr substrates

作者: Nasheeta Hanief , Candace I. Lang , Miroslava Topić

DOI: 10.1016/J.TSF.2016.02.042

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摘要: Abstract The morphological stability of coatings is an important factor for the reliability microelectronic devices operating at elevated temperature. focus this work was to characterise and explain coating degradation mechanisms Pt–Cr thereby find ways extending their temperature range. Platinum on chromium are shown be morphologically stable up 800 °C; higher temperatures observed. Scanning electron microscopy coated specimens with a systematic variation in both thickness annealing shows that significant grain-boundary grooving agglomeration can occur. This has implications temperatures.

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