A CMOS uncooled heat-balancing infrared imager

摘要: In this paper, we report the fabrication, design, and testing of an uncooled 8/spl times/8 infrared imager based on active pixel heat balancing technique. The is fabricated using a commercial CMOS process plus simple electrochemical etch stop releasing step. basic detector structure consists cascode amplifier in which PMOS devices are built inside thermally isolated floating n-well. intrinsic coupling currents with self-heating well forms electrothermal feedback loop that tends to maintain temperature constant, By employing balance between incoming radiation device power dissipation, responsivity controlled by biasing current. Measurements show responsivities 0.3-1.2/spl times/10/sup 6/ V/W when source chopped at 20 Hz detectivity D*=3/spl 7/ cm/spl radic/(Hz)W/sup -1/ 30 Hz. Noise measurements suggest D* 10/sup 8/ achievable design.