Analytical model for viscous damping and the spring force for perforated planar microstructures acting at both audible and ultrasonic frequencies
作者： Dorel Homentcovschi , Ronald N. Miles
DOI: 10.1121/1.2918542
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摘要: … damping and total spring force for a cell are very similar to those corresponding to a rectangular open microstructure without holes. … etching, the proper value of the viscous damping, the …
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