Opto-electrical position-measuring device

作者: Wolfgang Dr. Holzapfel

DOI:

关键词:

摘要: Light from a light source (8) is modulated by several grids (4,1) which can be displaced relative to one another causing deflected beams interfere with another. Several photo-detectors (6,7) are used form signals phase and at least of the grid has diagonal zones arranged behind other (2,3) identical or only insignificantly different pitch periods (TT). Each periodic markings spaced diagonally apart across direction measurement. This displacement differs 180 degrees part these directed photo-detectors.

参考文章(8)
Robert Martin Pettigrew, Displacement measuring apparatus and method ,(1984)
Walter Dipl.-Ing. Huber, Wolfgang Dr. Dipl.-Phys. Holzappel, Interferometric measuring device for at least one measuring direction ,(1990)
Walter Dipl.-Ing. Huber, Dieter Dipl.-Ing. Michel, Photo-electric position measuring device ,(1991)
Jan Gerard C O Int. Octrooibureau B.V. Dil, Optical transducer element and displacement meter comprising such an element ,(1986)
Wolfgang Dr. Holzapfel, Interferometric position measuring device ,(1991)