Positioning device having two manipulators operating in parallel, and optical lithographic device provided with such a positioning device

摘要: A positioning device has two transport arms for alternately transferring plate-shaped objects from a storage position into an operational position. The are each displaceable by means of separate manipulator, so that quick exchange the is possible. manipulators comprise parallel Y-guides which fastened to frame, and X-guide along Y-guides, while one X-guides. used in optical lithographic placing masks on mask support. machine frame support coupled spring members. To render accurate possible, provided with sensor system electronic control unit controlling device.