Method of manufacturing film bulk acoustic resonator using internal stress of metallic film and resonator manufactured thereby
作者： Sung-Hoon Choa , Young-Tack Hong , Jong-seok Kim , In-Sang Song
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摘要: A method of manufacturing a film bulk acoustic resonator and the manufactured thereby. The includes laminating sacrificial layer on semiconductor substrate, removing predetermined area from to realize electric contact between signal line substrate lower electrode, forming electrode by depositing metal for layer, patterning based shape piezoelectric material an upper wherein at least one deposition pressure power is controlled generate upward stress when electrode.
lens.org 参考文章(15)
Farrokh Ayazi, Shweta Humad, Gianluca Piazza, Gavin Kar-Fai Ho, Reza Abdolvand, Piezoelectric on semiconductor-on-insulator microelectromechanical resonators ,(2003)
Francesco Lemmi, David K. Fork, Koenraad F. Van Schuylenbergh, Decai Sun, Donald L. Smith, Eric Peeters, Jeng Ping Lu, Linda T. Romano, Christopher L. Chua, Photolithographically-patterned out-of-plane coil structures and method of making ,(2001)
Markku Antero Ylilammi, Thin-film bulk acoustic resonator with enhanced power handling capacity ,(2000)
Albert P. Pisano, Gianluca Piazza, Philip J. Stephanou, Contour-mode piezoelectric micromechanical resonators ,(2006)
Markku Ylilammi, Jyrki Molarius, Method of producing a piezoelectric thin film and bulk acoustic wave resonator fabricated according to the method ,(2001)
Tetsuo Yamada, Film bulk acoustic resonator Journal of the Acoustical Society of America. ,vol. 119, pp. 682- ,(2002) , 10.1121/1.2174405
M. Strassner, J. Daleiden, N. Chitica, D. Keiper, B. Stålnacke, S. Greek, K. Hjort, III-V semiconductor material for tunable Fabry-Perot filters for coarse and dense WDM systems Sensors and Actuators A-physical. ,vol. 85, pp. 249- 255 ,(2000) , 10.1016/S0924-4247(00)00396-4
Young-Tack Hong, In-Sang Song, Sang-chae Jugong Apartment Kim, Method for fabricating cantilevered type film bulk acoustic resonator and film bulk acoustic resonator fabricated by the same ,(2004)
Drew Cushman, Robert B. Stokes, Jay D. Cushman, Low frequency mechanical resonator ,(1995)
Hidenori Abe, Yoshihiko Yano, Hisatoshi Saitou, Takao Noguchi, Multilayer thin film and its fabrication process as well as electron device ,(2001)