Probe card covering system and method

作者: Carl V. Reynolds , Benjamin N. Eldridge

DOI:

关键词:

摘要: The present invention discloses a cover over electrical contacts of probe card used in testing die on wafer. A machine is disclosed as having the covered therein. Various mechanisms for uncovering while it located tester are disclosed.

参考文章(23)
Richard Harry Plourde, Robert Allison Hart, Probe card shipping and handling system ,(1996)
John T. Venaleck, John Tengler, Alan L. Roath, High performance test interface ,(1999)
Charles H. Schwar, John D. Platt, Positioning fixture for integrated circuit chip testing board ,(1986)
Danny H. Olsen, Bathroom appliance cabinet ,(1994)
John K. Cameron, EMI protected connector assembly ,(1978)
Igor Y. Khandros, Gaetan L. Mathieu, Flexible contact structure with an electrically conductive shell ,(1994)
Gaetan L. Mathieu, Gary W. Grube, Benjamin N. Eldridge, Lithographic contact elements ,(1999)
Igor Y. Khandros, Gaetan L. Mathieu, David V. Pedersen, Benjamin N. Eldridge, Method of making microelectronic spring contact elements ,(1997)