Finite element analysis of CMUTs with pressurized cavities
作者： Nikhil Apte , Kwan Kyu Park , Butrus T. Khuri-Yakub
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摘要: We propose using CMUTs with pressurized cavities in environments extreme pressure variations. By controlling the inside cavity, differential across CMUT plate can be kept low, ensuring a stable operating point and preventing mechanical failure. In such CMUTs, squeeze film is formed between substrate, which provides additional damping as well stiffening. The from helps increase bandwidth of CMUT. present new method for performing finite element analysis structures ANSYS. fabricated variety vented frequency range ~100-200 kHz, exhibited quality factor 25-30 air at 1 atm pressure. Our model successfully predicts center these devices.
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