Crystallization of diamond from the gas phase; Part 1
作者： Andrzej R. Badzian , Robert C. DeVries
DOI: 10.1016/0025-5408(88)90013-X
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摘要: Abstract The paper discusses growth mechanisms of diamond from the gas phase taking into account previously presented theory and experimental data. A chemical kinetics model for deposition graphite hydrocarbon gases is presented, based on work Derjaguin, Fedoseev coworkers. mechanism proposed by Derjaguin et al. expanded to consider relationship between temperature dependence rate atomic reconstruction surface. process which integrates factors (thermodynamics, kinetics, chemisorption) physical (thermal vibrations, surface transformation diffusion).
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sci-hub.se 参考文章(28)
Seiichiro Matsumoto, Chemical vapour deposition of diamond in RF glow discharge Journal of Materials Science Letters. ,vol. 4, pp. 600- 602 ,(1985) , 10.1007/BF00720043
S. V. Pepper, Transformation of the diamond (110) surface Journal of Vacuum Science and Technology. ,vol. 20, pp. 213- 216 ,(1982) , 10.1116/1.571359
Seiichiro Matsumoto, Yoichiro Sato, Mutsukazu Kamo, Nobuo Setaka, Vapor Deposition of Diamond Particles from Methane Japanese Journal of Applied Physics. ,vol. 21, pp. L183- L185 ,(1982) , 10.1143/JJAP.21.L183
D. J. Chadi, π-bonded molecular and chain models for the Si(111) surface Physical Review B. ,vol. 26, pp. 4762- 4765 ,(1982) , 10.1103/PHYSREVB.26.4762
D. Haneman, Surface Structures and Properties of Diamond-Structure Semiconductors Physical Review. ,vol. 121, pp. 1093- 1100 ,(1961) , 10.1103/PHYSREV.121.1093
B.V. Spitsyn, L.L. Bouilov, B.V. Derjaguin, Vapor growth of diamond on diamond and other surfaces Journal of Crystal Growth. ,vol. 52, pp. 219- 226 ,(1981) , 10.1016/0022-0248(81)90197-4
Akira Ono, Tetsuya Baba, Hiroyuki Funamoto, Akira Nishikawa, Thermal Conductivity of Diamond Films Synthesized by Microwave Plasma CVD Japanese Journal of Applied Physics. ,vol. 25, pp. L808- L810 ,(1986) , 10.1143/JJAP.25.L808
J.C. Phillips, Excitonic instabilities, vacancies, and reconstruction of covalent surfaces Surface Science. ,vol. 40, pp. 459- 469 ,(1973) , 10.1016/0039-6028(73)90137-4
B. J. Waclawski, D. T. Pierce, N. Swanson, R. J. Celotta, Direct Verification of Hydrogen Termination of the Semiconducting Diamond (111) Surface Journal of Vacuum Science and Technology. ,vol. 21, pp. 368- 370 ,(1982) , 10.1116/1.571782
T.E. Derry, C.C.P. Madiba, J.P.F. Sellschop, Oxygen and hydrogen on the surface of diamond Nuclear Instruments and Methods in Physics Research. ,vol. 218, pp. 559- 562 ,(1983) , 10.1016/0167-5087(83)91042-6