Molecular weight distribution and solubility changes in ion-bombarded polystyrene

作者: Orazio Puglisi , Antonio Licciardello , Lucia Calcagno , Gaetano Foti

DOI: 10.1016/S0168-583X(87)80173-8

关键词:

摘要: Among the chemical and physical modifications induced by ion bombardment on polymers, solubility changes have attracted considerable attention owing to technological interest for microlithography purpose. The are due occurrence of cross-linking scission at molecular level with heavy modification weight distribution too. implanted polystyrene shows upon bombardment. These been followed bombarded nearly-monodisperse PS samples. use samples known allows apply Gel Theory determining yields. This method is a direct, relatively simple tool following in polymers.

参考文章(8)
H. Ryssel, K. Haberger, H. Kranz, Ion-beam sensitivity of polymer resists Journal of Vacuum Science and Technology. ,vol. 19, pp. 1358- 1362 ,(1981) , 10.1116/1.571210
T. M. Hall, A. Wagner, L. F. Thompson, Ion beam exposure characteristics of resists: Experimental results Journal of Applied Physics. ,vol. 53, pp. 3997- 4010 ,(1982) , 10.1063/1.331261
A. Charlesby, Solubility and molecular size distribution of crosslinked polystyrene Journal of Polymer Science. ,vol. 11, pp. 513- 520 ,(1953) , 10.1002/POL.1953.120110601
Ilesanmi Adesida, Ion bombardment of resists Nuclear Instruments and Methods in Physics Research. pp. 79- 86 ,(1983) , 10.1016/0167-5087(83)90785-8
T. Venkatesan, High energy ion beam modification of polymer films Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 7, pp. 461- 467 ,(1985) , 10.1016/0168-583X(85)90413-6
T. M. Hall, A. Wagner, L. F. Thompson, Ion beam exposure characteristics of resists Journal of Vacuum Science and Technology. ,vol. 16, pp. 1889- 1892 ,(1979) , 10.1116/1.570321
Mitio Inokuti, Gel Formation in Polymers Resulting from Simultaneous Crosslinking and Scission The Journal of Chemical Physics. ,vol. 38, pp. 2999- 3005 ,(1963) , 10.1063/1.1733633
Paul J. Flory, Molecular Size Distribution in Three Dimensional Polymers. III. Tetrafunctional Branching Units Journal of the American Chemical Society. ,vol. 63, pp. 3096- 3100 ,(1941) , 10.1021/JA01856A063