作者: Orazio Puglisi , Antonio Licciardello , Lucia Calcagno , Gaetano Foti
DOI: 10.1016/S0168-583X(87)80173-8
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摘要: Among the chemical and physical modifications induced by ion bombardment on polymers, solubility changes have attracted considerable attention owing to technological interest for microlithography purpose. The are due occurrence of cross-linking scission at molecular level with heavy modification weight distribution too. implanted polystyrene shows upon bombardment. These been followed bombarded nearly-monodisperse PS samples. use samples known allows apply Gel Theory determining yields. This method is a direct, relatively simple tool following in polymers.