Evaluation of Total Electron Scattering Cross Sections of Plasma-Relevant Molecules

作者: H. Cho , J.-S. Yoon , M.-Y. Song

DOI: 10.13182/FST13-A16441

关键词:

摘要: AbstractIn plasmas including fusion plasmas, various molecules exist in neutral and ionized forms interact with each other as well electrons photons. To properly understand control the plasma, cross sections of these interactions are needed. Many interaction processes initiated by electron scattering, therefore an understanding scattering atoms plasma their associated very important to plasma. In this paper we evaluate total (TCSs) for eight plasma-relevant molecules–C2F6, CF3Cl, CF3I, C3F8, c-C4F8, CH4, C2H4, C2H6–both present recommended TCSs demonstrate evaluation methods. We have reviewed data from literature up mid-2012 energy range interest is 100 eV. common molecules, which supposed be best situation among sections, far satisfactory. More...

参考文章(32)
M. Jelisavcic, R. Panajotovic, M. Kitajima, M. Hoshino, H. Tanaka, S. J. Buckman, Electron scattering from perfluorocyclobutane (c-C4F8). Journal of Chemical Physics. ,vol. 121, pp. 5272- 5280 ,(2004) , 10.1063/1.1782174
L. G. Christophorou, J. K. Olthoff, Electron Interactions With Plasma Processing Gases: An Update for CF4, CHF3, C2F6, and C3F8 Journal of Physical and Chemical Reference Data. ,vol. 28, pp. 967- 982 ,(1999) , 10.1063/1.556042
D. Field, N. C. Jones, S. L. Lunt, J.-P. Ziesel, R. J. Gulley, Low energy electron scattering in CF2Cl2 and CF3Cl Journal of Chemical Physics. ,vol. 115, pp. 3045- 3052 ,(2001) , 10.1063/1.1387475
K Sunohara, M Kitajima, H Tanaka, M Kimura, H Cho, Low-energy electron scattering by CF3Cl and CF3Br: elastic scattering and vibrational excitation Journal of Physics B. ,vol. 36, pp. 1843- 1856 ,(2003) , 10.1088/0953-4075/36/9/314
Jason E. Sanabia, Gregory D. Cooper, John A. Tossell, John H. Moore, Total electron-scattering cross sections for CHF3, C2F6, C3F8, and c-C4F8 Journal of Chemical Physics. ,vol. 108, pp. 389- 391 ,(1998) , 10.1063/1.475399
Czesław Szmytkowski, Stanisław Kwitnewski, Elżbieta Ptasińska-Denga, Electron collisions with tetrafluoroethylene (C2F4) and ethylene (C2H4) molecules Physical Review A. ,vol. 68, pp. 032715- ,(2003) , 10.1103/PHYSREVA.68.032715
L. G. Christophorou, J. K. Olthoff, Electron Interactions With C3F8 Journal of Physical and Chemical Reference Data. ,vol. 27, pp. 889- 913 ,(1998) , 10.1063/1.556024
A Zecca, G Karwasz, R S Brusa, C Szmytkowski, Absolute total cross sections for electron scattering on CH4 molecules in the 1-4000 eV energy range Journal of Physics B. ,vol. 24, pp. 2747- 2754 ,(1991) , 10.1088/0953-4075/24/11/015