Electro chemical deposition and replenishment apparatus

作者: Arthur Keigler , Demetrius Papapanayiotou , David Guarnaccia , Jonathan Hander , Johannes Chiu

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摘要: An electrochemical deposition apparatus adapted to deposit metal onto a surface of substrate, the has frame configured for holding process electrolyte. A substrate holder is removably coupled frame, supporting in anode fluid compartment and containing an anolyte having facing further ion exchange membrane disposed between removable from as unit with anode. The holder, are arranged so that ions pass through into primarily replenish electrolyte depleted by substrate.

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