Ultrasonic phase array transducer with an ultralow impedance backfill and a method for making
作者： Peter William Lorrain , Lowell Scott Smith
DOI: 10.1121/1.424321
关键词:
摘要: The present invention discloses an ultrasonic phased array transducer with ultralow backfill and a method for making. includes low density material having acoustic impedance. is either aerogel, carbon xerogel, or xerogel. A piezoelectric ceramic two matching layers are bonded to the material. In one embodiment, plurality of interconnect vias formed in conducting deposited vias. portion layers, material, have isolation cuts therethrough form electrically acoustically isolated individual elements. second electronic layer at face opposite layers. Then made through
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