作者: Agham-Bayan Posadas , Mikk Lippmaa , Fred J Walker , Matthew Dawber , Charles H Ahn
DOI: 10.1007/978-3-540-34591-6_6
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摘要: … FJ Walker, RA McKee: High-k crystalline gate dielectrics: {A} research perspective, in HR Huff, DC Gilmer (Eds.): High Dielectric Constant Materials – VLSI MOSFET Applications (Springer …