Method of cleaning objects to be processed
作者： Yuji Kamikawa , Kinya Ueno , Satoshi Nakashima
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摘要: A method for cleaning an object to be processed in which the atmosphere a drying chamber is replaced by inert gas prior placing cleaned from external environment into chamber. The then transported elongated retaining member through lower opening processing bath disposed below bath. where it dried filling of with organic solvent. process carried out while screened nitrogen-gas curtain. also includes lid insertion and closing after object, as well may include exhausting supplying gas, decompressing chemical cleaning, water ozone object.
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