摘要: Electron energy-loss spectroscopy (EELS) involves analyzing the energy distribution of initially monoenergetic electrons after they have interacted with a specimen. This interaction is sometimes confined to few atomic layers, as when beam low-energy (100–1000 eV) “reflected” from solid surface. Because high voltages are not involved, apparatus relatively compact but low penetration depth implies use ultrahigh vacuum. Otherwise information obtained mainly carbonaceous or oxide layers on specimen’s At these primary energies, monochromator can reduce spread millielectron volts (1991) and if spectrometer has comparable resolution, spectrum contains features characteristic exchange vibrational modes surface atoms, well valence electron excitation in atoms. The technique therefore referred high-resolution (HREELS) used study physics chemistry surfaces adsorbed atoms molecules. Although it an important tool science, HREELS uses concepts that somewhat different those involved microscope studies will be discussed further present volume. instrumentation, theory, applications described by Ibach Mills (1982) Kesmodel (2006).