structural study of a-Si1-xCx:H by EXAFS and X-Ray scattering
作者： C. Meneghini , S. Pascarelli , F. Boscherini , S. Mobilio , F. Evangelisti
DOI: 10.1016/S0022-3093(05)80060-2
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摘要: We present a comprehensive study of short range order in a-Si 1-x C x :H using X-ray scattering and Si K-edge EXAFS. The probes the total radial distribution function; by detailed fitting R-space we measure parameters around for first second shell. C-C distances shell indicate that both carbidic graphitic configurations are present. coordination numbers there is tendency to chemical order; at high concentrations evidence with phase separation. EXAFS measurements probe local Si-C alloy phase; clear even this chemically ordered.
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