3D-shape measurement apparatus
作者： Yuji Ono
DOI:
关键词:
摘要: In a 3D-shape measurement apparatus, photoreceptive optical system for linearly scanning target-to-be-measured with light beam and guiding reflected from the object to convergence lens is constituted such that position of an apparent emission point be incident on moves in same direction as along which deviates due deformation system, always positioned plane even when varies.
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