作者: Hiroyuki Ikeda , Toshihiko Kuriyama , Yuzo Seo , Takeshi Kuriwada
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摘要: A magnetic pattern forming apparatus, which is designed to form a desired on disk having layer substrate, made up of mask identical or similar the pattern, projection optical system for exposing spot-like energy beam coming through heat projecting at one-to-one ratio predetermined reduction ratio, field applying device an external disk, control unit conducting scanning with respect and in their radial directions while rotating mask.