Cathodoluminescence as a method for the study of degradation of polysilanes
作者： P. Horák , P. Schauer
DOI: 10.1016/J.NIMB.2006.09.008
关键词:
摘要: The paper presents a unique cathodoluminescent (CL) method suitable for studying polysilane properties and the first CL characteristics of material being investigated. Poly[methyl(phenyl)silylene] (PMPSi) was selected as typical representative polysilanes. PMPSi study is based on measurement intensity emission after passing through specimen. major problem this susceptibility investigated to degradation by electron beam. strongly decreases intensity. Therefore, detection in synchronous mode used eliminate influence background noise. It found that process partly reversible. A partial recovery attributed reverse recombination reactions silyl radicals vacuum 20 h annealing at room temperature. Understanding physical chemical mechanisms reversible interesting science well application (e.g. resist beam lithography or molecular scale electronic devices).
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