Handbook of ion beam processing technology
作者： Commonwealth Scientific Corp. , S.M. Rossnagel , J.J. Cuomo
DOI:
关键词:
摘要: The work presented in this book deals with ion beam processing for basic sputter etching of samples, for sputter deposition of thin films, for the synthesis of material in thin form, and for …
osti.gov
asme.org 参考文章(0)